Liu, Jiachen
Liu, Dameng
Shao, Tianmin
Funding for this research was provided by:
State Key Basic Research Program (2012CB934101)
National Natural Science Foundation of China (Grant no. 90923018)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Fabrication of micro grooves on silicon by micro optical fiber enhanced pulse laser irradiation
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-02-13
Date accepted: 2015-04-28
Online publication date: 2015-06-18