Marzouk, Jaouad
Arscott, Steve
El Fellahi, Abdelhatif
Haddadi, Kamel
Lasri, Tuami
Boyaval, Christophe
Dambrine, Gilles
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: MEMS probes for on-wafer RF microwave characterization of future microelectronics: design, fabrication and characterization
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-01-12
Date accepted: 2015-04-23
Online publication date: 2015-06-23