Gualdino, A
Gaspar, J
Chu, V
Conde, J P
Funding for this research was provided by:
Fundacao para a Ciencia e a Tecnologia
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Sub-micron gap in-plane micromechanical resonators based on low-temperature amorphous silicon thin-films on glass substrates
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-12-13
Date accepted: 2015-05-06
Online publication date: 2015-06-23