Zhu, Yong
Chang, Tzu-Hsuan
Funding for this research was provided by:
Division of Civil, Mechanical and Manufacturing Innovation (1301193)
Division of Materials Research (1410475)
Journal title: Journal of Micromechanics and Microengineering
Article type: rev
Article title: A review of microelectromechanical systems for nanoscale mechanical characterization
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-01-06
Date accepted: 2015-04-27
Online publication date: 2015-08-19