Gosset, N
Boufnichel, M
Bahette, E
Khalfaoui, W
Ljazouli, R
Grimal-Perrigouas, V
Dussart, R
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Single and multilayered materials processing by argon ion beam etching: study of ion angle incidence and defect formation
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-02-20
Date accepted: 2015-06-23
Online publication date: 2015-08-17