Qu, Hao
Yu, Huijun
Zhou, Wu
Peng, Bei
Peng, Peng
He, Xiaoping
Funding for this research was provided by:
National Natural Science Foundation of China (51505068)
National Natural Science Foundation of China (U1530132)
National Natural Science Foundation of China (51575090)
Fundamental Research Funds for the Central Universities (ZYGX2014Z004)
Fundamental Research Funds for the Central Universities (ZYGX2015J085)
Fundamental Research Funds for the Central Universities (ZYGX2013J097)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Effects of dielectric charging on the output voltage of a capacitive accelerometer
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-03-29
Date accepted: 2016-08-25
Online publication date: 2016-09-28