Qu, Hao
Yu, Huijun
Zhou, Wu
Peng, Bei
Peng, Peng
He, Xiaoping
Funding for this research was provided by:
National Natural Science Foundation of China (51505068, U1530132, 51575090)
Fundamental Research Funds for the Central Universities (ZYGX2014Z004, ZYGX2015J085, ZYGX2013J097)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Effects of dielectric charging on the output voltage of a capacitive accelerometer
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-03-29
Date accepted: 2016-08-25
Online publication date: 2016-09-28