Tang, Gongbin
Han, Tao
Zhang, Qiaozhen
Yamazaki, Kenta
Omori, Tatsuya
Hashimoto, Ken-ya
Funding for this research was provided by:
Japan Society for the Promotion of Science
Ministry of education of China (NCET-12-0357, RFDP-20120073110021)
Murata Science Foundation
Ministry of Education, Culture, Sports, Science, and Technology
National Natural Science Foundation of China (11174205, 11474203, 11404209)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Validity evaluation of ScxAl1−xN material constants based on SAW characteristics
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-06-27
Date accepted: 2016-08-15
Online publication date: 2016-09-28