Bahette, E
Michaud, J F
Certon, D
Gross, D
Perroteau, M
Alquier, D
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-07-20
Date accepted: 2016-07-04
Online publication date: 2016-10-19