Syms, Richard R A
Wright, Steven
Journal title: Journal of Micromechanics and Microengineering
Article type: rev
Article title: MEMS mass spectrometers: the next wave of miniaturization
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-02-23
Date accepted: 2015-10-20
Online publication date: 2016-01-08