Luo, Xin
Gianchandani, Yogesh B
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: A 100μm diameter capacitive pressure sensor with 50 MPa dynamic range
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-08-14
Date accepted: 2016-02-10
Online publication date: 2016-03-07