Kose, Talha
Azgin, Kivanc
Akin, Tayfun
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Design and fabrication of a high performance resonant MEMS temperature sensor
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-11-29
Date accepted: 2016-02-05
Online publication date: 2016-03-11