Choi, Sungwoo
Kook, YunHo
Kim, ChulHo
Yoo, SoonSung
Park, Kwon-Shik
Kim, Seok-min
Kang, Shinill
Funding for this research was provided by:
The Global Leading Technology Program funded by the Ministry of Trade, Industry and Energy, Republic of Korea (10042433)
The National Research Foundation of Korea(NRF) Grant funded by the Korean Government(MSIP) (2015R1A5A1037668)
The Global Frontier Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Science, ICT & Future Planning (NRF-2014M3A6B3063732)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: The effect of mold materials on the overlay accuracy of a roll-to-roll imprinting system using UV LED illumination within a transparent mold
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-01-11
Date accepted: 2016-03-22
Online publication date: 2016-04-26