Kim, Yong-Sik
Shi, Hongliang
Dagalakis, Nicholas G
Gupta, Satyandra K
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Design of a MEMS-based motion stage based on a lever mechanism for generating large displacements and forces
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-12-01
Date accepted: 2016-06-14
Online publication date: 2016-07-06