Koutsoureli, M
Xavier, S
Michalas, L
Lioutas, C
Bansropun, S
Papaioannou, G
Ziaei, A
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Electrical properties of nanostructured SiN films for MEMS capacitive switches
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-07-07
Date accepted: 2016-10-05
Online publication date: 2016-10-28