Xue, Yuan
He, Siyuan
Funding for this research was provided by:
The Natural Sciences and Engineering Research Council of Canada (NSERC)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: A translation micromirror with large quasi-static displacement and high surface quality
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-05-17
Date accepted: 2016-07-25
Online publication date: 2016-10-28