Doğan, İlker
Westerman, René H J
van de Sanden, Mauritius C M
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Improved size distribution control of silicon nanocrystals in a spatially confined remote plasma
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-08-11
Date accepted: 2014-12-08
Online publication date: 2015-01-08