Lee, Hyo-Chang
Chung, Chin-Wook
Funding for this research was provided by:
Converging Research Center Program (2012K001238)
Basic Science Research Program (2013R1A1A2061730, 2013R1A6A3A01022941)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Electron heating and control of electron energy distribution for the enhancement of the plasma ashing processing
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-10-30
Date accepted: 2015-02-03
Online publication date: 2015-03-19