Liu, Wei
Wen, De-Qi
Zhao, Shu-Xia
Gao, Fei
Wang, You-Nian
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Characterization of O2/Ar inductively coupled plasma studied by using a Langmuir probe and global model
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-11-30
Date accepted: 2015-03-06
Online publication date: 2015-04-07