Ohtsu, Y
Yanagise, T
Funding for this research was provided by:
JSPS KAKENHI
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Sustaining mechanism and spatial structure of high-density ring-shaped hollow cuspate magnetized rf plasma for low-pressure plasma processing
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-11-26
Date accepted: 2015-04-13
Online publication date: 2015-05-21