Dolgov, A
Yakushev, O
Abrikosov, A
Snegirev, E
Krivtsun, V M
Lee, C J
Bijkerk, F
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Extreme ultraviolet (EUV) source and ultra-high vacuum chamber for studying EUV-induced processes
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-11-17
Date accepted: 2015-03-10
Online publication date: 2015-04-29