Lebedev, Yu A
Journal title: Plasma Sources Science and Technology
Article type: rev
Article title: Microwave discharges at low pressures and peculiarities of the processes in strongly non-uniform plasma
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-01-28
Date accepted: 2015-05-22
Online publication date: 2015-08-20