Panjan, Matjaž
Loquai, Simon
Klemberg-Sapieha, Jolanta Ewa
Martinu, Ludvik
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Non-uniform plasma distribution in dc magnetron sputtering: origin, shape and structuring of spokes
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-05-20
Date accepted: 2015-09-30
Online publication date: 2015-10-27