van der Horst, R M
Beckers, J
Osorio, E A
van de Ven, T H M
Banine, V Y
Funding for this research was provided by:
ASML
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Radiating plasma species density distribution in EUV-induced plasma in argon: a spatiotemporal experimental study
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-08-25
Date accepted: 2015-10-22
Online publication date: 2015-11-17