Zhang, Yunchao
Charles, Christine
Boswell, Rod
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Characterization of an annular helicon plasma source powered by an outer or inner RF antenna
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-03-24
Date accepted: 2015-11-12
Online publication date: 2015-12-14