Franz, Robert
Clavero, César
Kolbeck, Jonathan
Anders, André
Funding for this research was provided by:
Austrian Science Fund (J3168-N20)
Lawrence Berkely National Laboratory (DE-AC02-05CH11231)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOxfilm growth
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-07-14
Date accepted: 2015-12-04
Online publication date: 2016-01-21