Korolov, I
Derzsi, A
Donkó, Z
Schüngel, E
Schulze, J
Funding for this research was provided by:
Hungarian Scientific Research Fund (OTKA K105476)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: The influence of electron reflection/sticking coefficients at the electrodes on plasma parameters in particle-in-cell simulations of capacitive radio-frequency plasmas
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-06-29
Date accepted: 2015-12-11
Online publication date: 2016-01-21