Bruneau, Bastien
Lafleur, Trevor
Booth, Jean-Paul
Johnson, Erik
Funding for this research was provided by:
ANR (ANR-13-PRGE-0003-01)
Doctoral School of Ecole Polytechnique (EDX Grand)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-10-30
Date accepted: 2016-01-07
Online publication date: 2016-02-08