Trong Tue, Phan
Shimoda, Tatsuya
Takamura, Yuzuru
Funding for this research was provided by:
Core Research for Evolutional Science and Technology
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Lift-off process for fine-patterned PZT film using metal oxide as a sacrificial layer
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-07-05
Date accepted: 2016-10-26
Online publication date: 2016-12-05