Kakati, A
Maji, D
Das, S
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Unveiling the wet chemical etching characteristics of polydimethylsiloxane film for soft micromachining applications
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-09-14
Date accepted: 2016-11-08
Online publication date: 2016-12-05