Deng, T
Sun, Z
Li, G
Chen, J
Chen, D
Wang, J
Funding for this research was provided by:
National High Technology Research and Development Program of China (2014AA093408)
National Natural Science Foundation of China (61431019)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Microelectromechanical system-based electrochemical seismic sensors with an anode and a cathode integrated on one chip
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-05-12
Date accepted: 2016-09-14
Online publication date: 2016-12-12