Colbert, Keegan
Naraghi, Mohammad
Boyd, James G
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: An experimentally verified model for thermal microactuators including nonlinear material properties, vacuum, and intra-device heat conduction
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-08-29
Date accepted: 2016-12-06
Online publication date: 2017-01-09