Iwata, T
Soo, W P C
Matsuda, K
Takahashi, K
Ishida, M
Sawada, K
Funding for this research was provided by:
Japan Society for the Promotion of Science (15K18049)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Design, fabrication, and characterization of bridge-type micro-hotplates with an SU-8 supporting layer for a smart gas sensing system
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-08-29
Date accepted: 2016-12-22
Online publication date: 2017-01-11