Miao, Bin
Zhang, Jian
Ding, Xiangzhen
Wu, Dongmin
Wu, Yihui
Lu, Wenhui
Li, Jiadong
Funding for this research was provided by:
Chinese Academy of Sciences youth promotion project (2014278)
The State Key Laboratory of Applied Optics
National Natural Science Foundation of China (61573346, 61104226)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Improved metal assisted chemical etching method for uniform, vertical and deep silicon structure
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-02-06
Date accepted: 2017-03-22
Online publication date: 2017-04-12