Abada, S
Salvi, L
Courson, R
Daran, E
Reig, B
Doucet, J B
Camps, T
Bardinal, V
Funding for this research was provided by:
RENATECH
The French National Research Agency (ANR) (ANR-14-ASTR-0007 HYPOCAMP, ANR-15-CE19-0012 DOCT-VCSEL)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-12-09
Date accepted: 2017-03-30
Online publication date: 2017-04-12