Lee, Jaesung
Zamani, Hamidrera
Rajgopal, Srihari
Zorman, Christian A
Feng, Philip X-L
Funding for this research was provided by:
National Science Foundation SNM Award (CMMI-1246715)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: 3C-SiC microdisk mechanical resonators with multimode resonances at radio frequencies
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-01-11
Date accepted: 2017-04-03
Online publication date: 2017-06-06