Syms, Richard R A
Liu, Dixi
Ahmad, Munir M
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Nanostructured 2D cellular materials in silicon by sidewall transfer lithography NEMS
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-02-06
Date accepted: 2017-05-05
Online publication date: 2017-06-02