Dabsch, Alexander
Rosenberg, Christoph
Stifter, Michael
Keplinger, Franz
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Temperature dependency of silicon structures for magnetic field gradient sensing
Copyright information: © 2017 IOP Publishing Ltd
License information: cc-by Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2017-04-04
Date accepted: 2017-07-03
Online publication date: 2017-12-29