Tsukamoto, Takashiro
Asao, Hideaki
Tanaka, Shuji
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Stylus type MEMS texture sensor covered with corrugated diaphragm
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-04-25
Date accepted: 2017-07-10
Online publication date: 2017-08-07