Kusaka, Yasuyuki
Kanazawa, Shusuke
Koutake, Masayoshi
Ushijima, Hirobumi
Funding for this research was provided by:
Japan Society for the Promotion of Science (JP17K18410)
Ozawa and Yoshikawa Memorial Electronics Research Foundation
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Pattern size tolerance of reverse offset printing: a proximity deformation effect related to local PDMS slipping
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-06-08
Date accepted: 2017-08-30
Online publication date: 2017-09-21