Zhao, Yanfei
Wang, Hu
Zhang, Wei
Li, Jiadong
Shen, Yang
Huang, Zengli
Zhang, Jian https://orcid.org/0000-0001-7181-6021
Dingsun, An
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Controllable process of nanostructured GaN by maskless inductively coupled plasma (ICP) etching
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-07-20
Date accepted: 2017-09-13
Online publication date: 2017-09-28