Funding for this research was provided by:
National Cancer Institute (R01 CA142750)
Division of Civil, Mechanical and Manufacturing Innovation (1334340)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Dynamics of thin-film piezoelectric microactuators with large vertical stroke subject to multi-axis coupling and fabrication asymmetries
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-08-29
Date accepted: 2017-11-24
Online publication date: 2017-12-15