Funding for this research was provided by:
Army Research Office (W911NF-09-D-0001, W911NF-12-1-0031)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: A repeatable and scalable fabrication method for sharp, hollow silicon microneedles
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2017-08-19
Date accepted: 2018-01-10
Online publication date: 2018-01-31