Müller, Michelle https://orcid.org/0000-0003-0825-0285
Maiwald, Verena
Thiele, Lothar
Beutel, Jan
Roman, Cosmin
Hierold, Christofer
Funding for this research was provided by:
Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung (Nano-Tera.ch)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Two-level bulk microfabrication of a mechanical broadband vibration amplitude-amplifier with ten coupled resonators
Copyright information: © 2018 IOP Publishing Ltd
License information: cc-by Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2017-12-14
Date accepted: 2018-01-31
Online publication date: 2018-02-19