Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST-105-2218-E-002-029-MY3)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: A CMOS-MEMS clamped–clamped beam displacement amplifier for resonant switch applications
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2017-12-19
Date accepted: 2018-02-21
Online publication date: 2018-03-19