Rochus, V https://orcid.org/0000-0001-9680-5724
Jansen, R
Goyvaerts, J
Neutens, P
O’Callaghan, J
Rottenberg, X
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Fast analytical model of MZI micro-opto-mechanical pressure sensor
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2017-10-31
Date accepted: 2018-03-06
Online publication date: 2018-03-28