Funding for this research was provided by:
The Deanship of Scientific Research (DSR) at King Fahd University of Petroleum and Minerals (KFUPM) (SB151005)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Novel threshold pressure sensors based on nonlinear dynamics of MEMS resonators
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2017-12-11
Date accepted: 2018-03-08
Online publication date: 2018-03-27