Dabsch, Alexander https://orcid.org/0000-0003-1557-9441
Rosenberg, Christoph
Klug, Patrick
Stifter, Michael
Keplinger, Franz
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Multiaxial resonant MEMS force sensor
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-02-01
Date accepted: 2018-04-30
Online publication date: 2018-06-19