Kalhauge, Kristoffer G https://orcid.org/0000-0002-9896-6289
Henrichsen, Henrik H
Wang, Fei https://orcid.org/0000-0003-1871-1022
Hansen, Ole https://orcid.org/0000-0002-6090-8323
Petersen, Dirch H https://orcid.org/0000-0002-9309-4186
Funding for this research was provided by:
Horizon 2020 Framework Programme (688225, 692527)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Vibration tolerance of micro-electrodes
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-02-16
Date accepted: 2018-05-17
Online publication date: 2018-06-06