Dwivedi, Priyanka https://orcid.org/0000-0002-4558-819X
Arya, Dhairya Singh
Dhanekar, Saakshi https://orcid.org/0000-0002-5350-1680
Das, Samaresh https://orcid.org/0000-0003-4159-1962
Funding for this research was provided by:
DST (IFA-12 ENG-13)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Development of scalable planar MEMS technology for low power operated ethanol sensor
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-04-22
Date accepted: 2018-07-23
Online publication date: 2018-08-13