Lei, Hongjie https://orcid.org/0000-0002-6494-9085
Wen, Quan
Yu, Fan
Li, Dongling
Shang, Zhengguo
Huang, Jian
Wen, Zhiyu
Funding for this research was provided by:
National Natural Science Foundation of China (61327002)
Fundamental Research Funds for Central Universities (106112017CDJXY120006)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: AlN film based piezoelectric large-aperture MEMS scanning micromirror integrated with angle sensors
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-07-16
Date accepted: 2018-09-11
Online publication date: 2018-10-03